Advanced Photon Source | Center for Nanoscale Materials

Office of Science User Facilities

MKS Instruments

MKS Instruments, Inc. is a global provider of instruments, subsystems and process control solutions that measure, control, power, monitor and analyze critical parameters of advanced manufacturing processes to improve process performance and productivity. Our products are derived from our core competencies in pressure measurement and control, materials delivery, gas composition analysis, control and information technology, power and reactive gas generation, vacuum technology, photonics, lasers, optics and motion control. Our primary served markets are manufacturers of capital equipment for thin film including semiconductor devices, process manufacturing, environmental, life sciences and scientific research.

2 Tech Drive Suite 201

Andover, MA 01810